Japanese scientists develop simplified EUV scanner that can make production of chips considerably cheaper
tomshardware.com/tech-industry/japanese-scientists-develop-simplified-euv-scanner-that-can-make-production-of-chips-considerably-cheaper
Quick Glance: Japanese Researchers Develop Cost-Effective EUV Scanner
- Professor Tsumoru Shintake of the Okinawa Institute of Science and Technology (OIST) has proposed a novel and significantly simplified EUV lithography scanner that is more cost-effective than conventional scanners from ASML.
- The innovative technology utilizes only two mirrors in its optical projection setup, representing a significant deviation from the conventional six-mirror configuration.
- The researchers led by Professor Shintake have successfully addressed two key challenges in EUV lithography: avoiding optical aberrations and ensuring an efficient light transfer.
- The performance of this new system has been thoroughly assessed through the use of optical simulation software, and OIST has already filed a patent, indicating readiness for commercial deployment.
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| Last Updated | Aug 06 |
| Total Articles | 2 |
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